JPH027793U - - Google Patents

Info

Publication number
JPH027793U
JPH027793U JP8480888U JP8480888U JPH027793U JP H027793 U JPH027793 U JP H027793U JP 8480888 U JP8480888 U JP 8480888U JP 8480888 U JP8480888 U JP 8480888U JP H027793 U JPH027793 U JP H027793U
Authority
JP
Japan
Prior art keywords
positioning device
piezoelectric element
applies
positioning
tables
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8480888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8480888U priority Critical patent/JPH027793U/ja
Publication of JPH027793U publication Critical patent/JPH027793U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP8480888U 1988-06-27 1988-06-27 Pending JPH027793U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8480888U JPH027793U (en]) 1988-06-27 1988-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8480888U JPH027793U (en]) 1988-06-27 1988-06-27

Publications (1)

Publication Number Publication Date
JPH027793U true JPH027793U (en]) 1990-01-18

Family

ID=31309488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8480888U Pending JPH027793U (en]) 1988-06-27 1988-06-27

Country Status (1)

Country Link
JP (1) JPH027793U (en])

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542691A (en) * 1977-06-08 1979-01-10 Hitachi Ltd Sample fine-adjustment equipment of electrostrictive driving type
JPS61285082A (ja) * 1985-06-10 1986-12-15 Toshiba Corp 圧電型駆動装置
JPS622553A (ja) * 1985-06-27 1987-01-08 Toshiba Corp 微動装置
JPS62219975A (ja) * 1986-03-20 1987-09-28 Copal Co Ltd 電歪素子駆動装置
JPS637175A (ja) * 1986-06-27 1988-01-13 Toshiba Corp 微少変位テ−ブル装置
JPS6351592B2 (en]) * 1981-08-12 1988-10-14 Hitachi Ltd

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542691A (en) * 1977-06-08 1979-01-10 Hitachi Ltd Sample fine-adjustment equipment of electrostrictive driving type
JPS6351592B2 (en]) * 1981-08-12 1988-10-14 Hitachi Ltd
JPS61285082A (ja) * 1985-06-10 1986-12-15 Toshiba Corp 圧電型駆動装置
JPS622553A (ja) * 1985-06-27 1987-01-08 Toshiba Corp 微動装置
JPS62219975A (ja) * 1986-03-20 1987-09-28 Copal Co Ltd 電歪素子駆動装置
JPS637175A (ja) * 1986-06-27 1988-01-13 Toshiba Corp 微少変位テ−ブル装置

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